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Mathematical modeling of processes of plasmachemical heterogeneous coatings of plasma flow
- Authors: Barvinok V.A.1, Bogdanovitch V.I.1, Kitaikin V.P.2
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Affiliations:
- Samara State Aerospace University
- «Metallist-Samara» Joint Stock Company
- Issue: Vol 1, No 1 (2002)
- Pages: 61-67
- Section: TECHNICAL SCIENCES
- URL: https://journals.ssau.ru/vestnik/article/view/6749
- ID: 6749
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Abstract
The physical and mathematical model for the obtaining of nitride coatings of vacuum ion-plasma method is created.
The mathematical model accounts the basic stages of the multistage process: adsorption, desorption, dissociation, chemisorption, accommodation, ion sputtering, surface migration.
The mathematical model permits to find the coating grouth rate and its composition from basic physical parameters of vacuum ion-plasma process.
About the authors
V. A. Barvinok
Samara State Aerospace University
Author for correspondence.
Email: vest@ssau.ru
Russian Federation
V. I. Bogdanovitch
Samara State Aerospace University
Email: vest@ssau.ru
Russian Federation
V. P. Kitaikin
«Metallist-Samara» Joint Stock Company
Email: vest@ssau.ru
Russian Federation
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