VESTNIK of Samara University. Aerospace and Mechanical EngineeringVESTNIK of Samara University. Aerospace and Mechanical Engineering2542-04532541-7533Samara National Research University6749UnknownMathematical modeling of processes of plasmachemical heterogeneous coatings of plasma flowBarvinokV. A.vest@ssau.ruBogdanovitchV. I.vest@ssau.ruKitaikinV. P.vest@ssau.ruSamara State Aerospace University«Metallist-Samara» Joint Stock Company180320021161670207201902072019Copyright © 2019, VESTNIK of Samara University. Aerospace and Mechanical Engineering2019<p>The physical and mathematical model for the obtaining of nitride coatings of vacuum ion-plasma method iscreated.<br />The mathematical model accounts the basic stages of the multistage process: adsorption, desorption, dissociation,chemisorption, accommodation, ion sputtering, surface migration.<br />The mathematical model permits to find the coating grouth rate and its composition from basic physical parametersof vacuum ion-plasma process.</p>