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Calculation of parameters of the Deal–Grove model for the oxidation of silicon
- Authors: Aizikovich A.A.1, Demakov Y.P.1
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Affiliations:
- Izhevsk State Technical University
- Issue: Vol 10, No 7 (2011)
- Pages: 64-68
- Section: ISSUE WITHOUT SECTION
- URL: https://journals.ssau.ru/vestnik/article/view/2956
- DOI: https://doi.org/10.18287/2541-7533-2011-0-7(31)-64-68
- ID: 2956
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Abstract
By means of mathematical modeling with the use of Mathcad software kinetic coefficients in the Deal-Grove model are determined on the basis of available experimental data for the dry and damp oxidation of silicon. A satisfactory agreement between the results of the modeling and experimental kinetic curves is obtained.
About the authors
A. A. Aizikovich
Izhevsk State Technical University
Author for correspondence.
Email: pmi@istu.ru
Head of the department of applied mathematics and
computer science, physics and mathematics, associate professor
Yu. P. Demakov
Izhevsk State Technical University
Email: pribor@istu.ru
Candidate of physical and mathematical science
Dean of faculty instrument
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