An automatic measuring system for investigation of semiconductor device structures

The problems of development of an automatic measuring system for the study of semiconductor device structures parameters are considered. This system can be used both for experimental development of the technology for obtaining structures and for studies of the resistance of structures to various external factors, including factors of open space. A block diagram of the measuring system is proposed, which allows changing its configuration by software to increase the number of measured parametersA block diagram of the measuring system is proposed, which allows changing its configuration by software to increase the number of measured parameters. A block diagram of the measuring system is proposed. This system is able to change its configuration programmatically to increase the number of measured parameters. The scheme of measuring ports and units of measuring system switching is offered. In this scheme, all ports are identical, which makes it possible to connect samples with different topology and number of contacts to the system. The possible variants of the schemes of measuring units that implement voltage-code, capacitance-code, code-current, etc. are proposed.