ASSOCIATES OF DOT DEFECTS OF VARIOUS NATURE IN SiC-PHASE OF SEMICONDUCTOR HETEROSTRUCTURE OF SiC//Si, RECEIVEDBY ENDOTAKSIYA METHOD

One of the main ways of increasing of reliability of sensors of physical quantities on the basis of high-temperature and radiation-hardened heterostructure of β-SiC/Si is the analysis of technological aspects of its forming (endotaksiya) regarding concentration distribution of dot defects of various nature, their probable models of association with participation of foreign impurity. Besides, the analysis of reversible processes of association opens ways of optimization of kinetics of diffusive mass transfer at phase transformation of substrate of silicon into a film of carbide of silicon. In the article dependences of concentration of neutral defects on factors of supersaturation of gas phase on conditional atomic concentration of carbon, from concentration of foreign impurity are given in a gas phase, from concentration of own defects of various nature having potential of formation of deep levels in the forbidden zone and potential of association. The analysis of the given dependences is made and recommendations about carrying out technological process of formation of difficult heterostructures of different function are made.

ассоциаты и точечные дефекты в полупроводниках, гете- роструктуры, гетероэндотаксия, карбид кремния на кремниевой подложке,