Physics of Wave Processes and Radio SystemsPhysics of Wave Processes and Radio Systems1810-31892782-294XPovolzhskiy State University of Telecommunications and Informatics1042010.18469/1810-3189.2022.25.2.28-39Research ArticleComparison of the main aspects of modern approaches to the development of surface acoustic wave filters: model of the coupling of mode and the finite element methodKoigerovAleksey S.<p>Candidate of Technical Sciences, associate professor of the Department of Micro and Nano Electronics, Saint Petersburg Electrotechnical University, Saint Petersburg, Russia. Author of 25 scientific publications.</p>
<p><em>Research interests</em>: modeling and design of microdevices based on surface acoustic waves.</p>a.koigerov@gmail.ruhttps://orcid.org/0000-0002-6602-0528Saint Petersburg Electrotechnical University25062022252283925062022Copyright © 2022, Koigerov A.S.2022<p>This article discusses the main issues of designing filters based on surface acoustic waves. A type of band-pass filter based on longitudinal resonant modes is presented. The features of the calculation based on two approaches are considered: the coupled mode model and the finite element method. Practical recommendations are proposed for reducing the time of filter calculation in numerical simulation. The results of calculating and measuring the transmission coefficient of a filter on a leaky surface acoustic waves on a 36 YX-cut lithium tantalate substrate are presented and compared. The main aspects and directions in which the considered modeling methods can be compared are highlighted and analyzed. It is shown that the use of different modeling approaches increases the development efficiency, and fast analytical models are required for the synthesis and optimization of filter parameters.</p>полосно-пропускающие фильтрыповерхностная акустическая волнафильтр на ПАВтанталат литиямодель связанных модметод конечных элементовпьезоэлектрическая подложкаbandpass filterssurface acoustic waveSAW filterlithium tantalateCOM modelfinite element methodpiezoelectric substrate[Aristarhov G.M. et al. Filtering and Spectral Analysis of Radio Signals. Algorithms. Structures. Devices. Moscow: Radiotehnika, 2020, 504 p. (In Russ.)][Filters on Surface Acoustic Waves (Calculation, Technology and Application); English trans. Ed. by G. Matthews. Moscow: Radio i svjaz’, 1981, 742 p. (In Russ.)][Yantchev V., Turner P., Plessky V. COMSOL modeling of SAW resonators. IEEE Ultrasonics Symposium Proceedings, 2016, pp. 1–4. DOI: https://doi.org/10.1109/ULTSYM.2016.7728546][Veremeev I.V., Dobershtejn S.A., Razgonjaev V.K. Simulation of SAW Resonators and Ladder SAW Filters by the P-Matrix Method. Tehnika radiosvjazi, 2018, no. 3, pp. 61–71. (In Russ.)][Plessky V., Koskela J. Coupling-of-modes analysis of SAW devices. International Journal of High Speed Electronics and Systems, 2000, vol. 10, no. 4, pp. 867–947. DOI: https://doi.org/10.1142/S0129156400000684][Sveshnikov B. Discrete analysis of regular systems. IEEE International Ultrasonics Symposium, 2010, pp. 1890–1893. DOI: https://doi.org/10.1109/ULTSYM.2010.5935881][Grigor’evskij V.I. Calculation of characteristics of devices on surface acoustic waves in the presence of reflections due to mechanical load in the area of electrodes. Radiotehnika i elektronika, 2009, vol. 54, no. 3, pp. 363–370. (In Russ.)][Dmitriev V.F. Derivation of modified equations of coupled surface acoustic waves. Radiotehnika i elektronika, 2009, vol. 54, no. 9, pp. 1134–1143. (In Russ.)][Koskela J. et al. Fast GPU-Assisted FEM Simulations of 3D Periodic TCSAW, IHP, and XBAR Devices. IEEE International Ultrasonics Symposium, 2019, pp. 181–184. DOI: https://doi.org/10.1109/ULTSYM.2019.8926183][Koskela J. et al. Rapid 2D FEM simulation of advanced SAW device. IEEE MTT-S International Microwave Symposium (IMS), 2017, pp. 1484–1486. DOI: https://doi.org/10.1109/MWSYM.2017.8058903][Hong J., Lancaster M.J. Microstrip Filters for RF/Microwave Applications. Hoboken: John Wiley & Sons. Inc., 2001, 457 p.][Malocha S. et al. Automated COM parameter extraction for SiO2/LiNbO3 and SiO2/LiTaO3 substrates. IEEE International Ultrasonics Symposium, 2016, pp. 1–4. DOI: https://doi.org/10.1109/ULTSYM.2016.7728387][Pastureaud T. Evaluation of the P-matrix parameters frequency variation using periodic FEM/BEM analysis. IEEE Ultrasonics Symposium, 2004, pp. 80–84. DOI: https://doi.org/10.1109/ULTSYM.2004.1417673][Tikka A., Said A.-S., Abbott D. Acoustic wave parameter extraction with application to delay line modelling using finite element analysis. Sensors & Transducers Journal, 2008, vol. 95, no. 8, pp. 26–39. URL: https://www.sensorsportal.com/HTML/DIGEST/P_311.htm][Koigerov A.S., Balysheva O.L. Numerical approach for extraction COM surface acoustic wave parameters from periodic structures analysis. Wave Electronics and its Application in Information and Telecommunication Systems (WECONF), 2021, pp. 1–6. DOI: https://doi.org/10.1109/WECONF51603.2021.9470638][Koigerov A.S. Ladder filters based on leaky surface acoustic waves on a lithium niobate substrate. Nano i mikrosistemnaja tehnika, 2021, vol. 23, no. 3, pp. 139–147. DOI: https://doi.org/10.17587/nmst.23.139-147 (In Russ.)][Auld B.A. Acoustic Fields and Waves in Solids. New York: Wiley, 1973, 414 p.][Sveshnikov B.V., Bagdasarjan A.S. Basic Principles of formation of transverse modes in multilayer waveguides of surface acoustic waves. Izvestija Vysshih uchebnyh zavedenij. Radiofizika, 2016, vol. 59, no. 2, pp. 108–123. (In Russ.)][Morgan D. Surface Acoustic Wave Filters with Applications to Electronic Communications and Signal Processing. Cambridge: Academic Press, 2010, 448 p.][Kovacs G. et al. Improved material constants for LiNbO3/ and LiTaO3. IEEE Symposium on Ultrasonics, 1990, vol. 1, pp. 435–438. DOI: https://doi.org/10.1109/ULTSYM.1990.171403]